Facilities and Equipment

The Nanoscale Fabrication and Characterization Facility

PINSE supports the Nanoscale Fabrication and Characterization Facility (NFCF), a 4,000-ft2 cleanroom user facility located in the sub-basement of Benedum Hall. The facility is divided into two sections, Characterization and Fabrication (Cleanroom).

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Characterization

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Dual Beam System

Electron Microscopes:

Scanning Probe Microscopy

Spectroscopy

Raman Microscope

X-Ray Diffraction

Sample Preparation

 

 

Fabrication (Cleanroom)

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Lithography

Thin Film Deposition

Dry Etching

Surface Profiler

Thermal Processing

Hoods