Scanning Electron Microscope (SEM)Divider

JEOL JSM-6510LV/LGS Scanning Electron Microscope (SEM) with Oxford Inca

The JSM-6510 has both standard high vacuum mode as well as Low vacuum mode.  Low vacuum SEM mode enables one to observe and analyze non-conductive, wet, non-high vacuum compatible specimens.

User-customizable graphic user interface (GUI) has automatic functions, recipes (standard & custom applications settings), multiple live image display, signal mixing, a desktop publisher and a browseable image database for comfortable operation from observation to report creation.

Software includes comprehensive on-screen help with animation videos for routine

SEM operation and maintenance, uses a flow chart and tab driven GUI and has user customizable icons for common operation.


Technical Specs:

  • Electron optics has a low magnifcation of 5X for easy sample survey.
  • Specimen chamber accepts up to 5" diameter x 50mm samples
  • High Vacuum Mode:
    • Resolution
      • 3.0nm guaranteed (30kV, SE)
      • 8.0nm guaranteed (3kV, SE)
      • 15nm guaranteed (1kV, SE)
    • Image Modes:
      • Secondary electron image (SE).
      • Backscattered electron image (BSE) detected by the SE Detector
      • Backscattered electron image detected by multi-element solid-state BSE detector. (composition, topography, shadow and extreme shadow iamges).
  • Low Vacuum Mode:
    • LV Specimen CHamper Pressure: 10 to 270 Pa
    • Resolution: 4.0nm guaranteed (30kV, BSE)
    • Image modes: Backscattered electron image (BSE) (composition, topography, shadow & extreme shadow images)
  • Magnification: 5X to 300,000X (149 Steps)
  • Aceelerating Volatage: 0.5kV to 30kV (53 Steps)
  • EDS
    • Working Distance: 10mm
    • Takeoff Angle: 35°
    • External scan interface and external data exchange is built in allowing direct control of the SEM column scan coils by a remote digital scan generator such as with an EDS system.

Safety and Training Requirements:

This device requires on-site, in person training prior to use.

Prior to usage of equipment review the following safety pages








Photo of the TEM

Facility: Characterization
Location: SB 60

User Guide

New User? See sign up instructions here.
Existing User? Link to FOM here.

Divider Emergencies dial 4-2121 for Pitt PoliceDivider


Supervisor: Susheng Tan

Phone: 412-383-5978



Co-Supervisor: Mike McDonald

Phone: 412-383-5977



General Contact Info:
Facility Phone: 412-383-8001
Facility Email:

Benedum Hall
3700 O'Hara Street
Pittsburgh, PA 15261
NFCF Lab, SB 60-63