Electron Beam Evaporation System

E-Beam Evap

Multi-source Electron Beam Evaporation System

Thermionics Laboratory VE180


The model VE-180 provides thin film coating of virtually any material quickly, cleanly and efficiently.  Our system is equipped with 3 kW 4 pocket e-Gun, thickness monitoring, sample heater, and indirect temperature monitoring.  A variety of evaporation source materials are available.  The system has an ultimate vacuum on the order of 1.1 x 10-7 with a vacuum of 5 x 10-5 or better recommended for deposition.

Vacuum System
Bell Jar: Stainless Steel, Viton® sealed
High Vacuum Pump: 520 l/sec turbomolecular pump
Roughing Pump: 10.6 cfm 2-stage, direct drive rotary
Control: Automatic pumpdown, interlocks to protect source and instrumentation
Pressure Instrumentation
High Vacuum: Ionization gauge with digital controller

Low Vacuum: Digital convection gauge
Evaporation System
Source: Electron beam gun

Power: 3 kW
Positions: 4 pocket
Metering: Digital deposition monitor
E-Beam Evap 2E-Beam Evap 3