Surface Profiler

Surface Profiler

Surface Profiler

KLA-Tencor Alpha-Step IQ

 

The Alpha-Step IQ stylus-based surface profiler combines high measurement precision with versatility and economy. Ideal for semiconductor pilot lines and materials research, this advanced surface profiler enables faster process learning and higher yields. With guaranteed 8Ã… (1 sigma) or 0.1% step height repeatability and sub-angstrom resolution, the Alpha-Step IQ surface profiler provides excellent repeatability and performance to analyze and monitor processes.  It provides advanced and customizable 2D surface analysis capabilities, enables easy location of measurement features via saved site image with recipe, and features excellent repeatability and reproducibility. This surface profiler precisely determines and analyzes thin step heights, surface micro roughness, and overall form error on thin film surface coatings while also providing sufficient vertical range for large topography variations. It includes multiple language support for users with a worldwide presence and enables faster analysis routines by applying saved sets of analysis instructions.

Specifications:
Alpha-Step precision scanner standard vertical range to 400 um with sub-angstrom electronic bit-wise vertical resolution
Zoom optics: 88-247x
Stylus: 12.5 um radius, 60o
Stylus: 5 um – 60o Radius
Stylus: 2 um radius, 60o
Stylus: 50 um radius 60 o
Stylus: 25 um radius 60 o
Stylus: 2 um radius 45 o
Maximum scan length: 10 mm
Manual precision X-Y stage: 6.2" diameter theta table