Single Wafer Spin Processor

Spin Processor

Single Wafer Spin Processor

Laurell Technologies WS-400B-6NPP-LITE

 

The WS-400 is a single wafer, manual dispense spin processor with a nitrogen purged process chamber and is manipulated by a digital controller.  The wafer is held in place during process by means of a vacuum chuck.  The digital controller has twenty programs each with fifty-one steps stored in non-volatile memory.  The program sizes and steps can be changed.  The spin processor is located within the Lithography Hood.
 

Specifications:
Chuck size range: 50 – 150 mm vacuum

Maximum RPM: 8000