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Thermionics Electron Beam Evaporation System
The Thermionics electron beam evaporation system is a physical vapor deposition technique which utilizes an intense electron beam to vaporize a source material under high vacuum. This technique is compatible with a wide variety of source materials and offers a wide range of well-controlled deposition rates.
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Key Features
- 3 kW 4 pocket e-Gun
- Thickness monitor
- Sample heater
- Substrates up to 100 mm
- Substrate rotation
- Available materials: Al, Au, Ti, Ni, Cr, Ge, Ag, AuGe, Invar and other per request
Key Applications and available processes
- Electronic and Optical Semiconductor films
- Wear resistant and thermal barrier coatings
General Documentation
ebeam evaporation system SOP (standard operation procedure)
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Equipment Fee
Fabrication Service 1