

The NFCF supports the fabrication and characterization of nanoscale materials and structures, and integration of devices at all length scales. The facility houses advanced equipment with core nano-level (20 nm or below) capability for fabrication and characterization, including electron-beam lithography system, dual-beam system, plasma etching, thin film deposition, TEM, multifunctional scanning probe station, modular XRD, and more (see Facilities and Equipment).
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In the news
Equipment updates
- Bruker DektekX Surface Profiler – installed and available.
- Filmetrix F40 – installed and available.
- Panalytical XRD - installed and available.
- Angstrom Thermal Evaporator - installed and available.
- Wire Bonder - installed, awaiting final commissioning. Use guide under development
- EBPG EBL - installed, awaiting final commissioning. User guide and equipment details under development.
- Fischione Suite - now available as part of the NanoLab in SB06. Review the Sample Preparation section of Characterization column here for more info.
COVID-19 Protocol
- Current COVID-19 Mitigation Protocol allows for masks optional during low and medium risk times. Cleanroom access requires mouth and nose covering for particulate control, of either mask or beard cover type provided.
- Exterior building access is limited in hours and to specific doors, extended access may be available on approval.